Phase formation processes in coevaporated CuIn-films (precursors). and the
formation of CuInS2 from these precursors by reactive annealing were invest
igated. Precursors were produced by simultaneous thermal evaporation of the
elements onto neat glass substrates. The Cu-In precursors were sulfurized
in a diluted H2S/H-2 atmosphere at various H2S concentrations. Subsequently
, the formation of CuInS2 was studied after both incomplete and complete su
lfurization. The films were characterized by means of Rutherford backscatte
ring spectroscopy (RBS), X-ray diffraction (XRD) and scanning electron micr
oscopy (SEM). The analysis of the XRD data was carried out by a RIETVELD ty
pe algorithm. It was found that next to composition and morphology of the p
recursors, the concentration of H2S in the reactive atmosphere is a signifi
cant parameter for the formation process and the microstructure of the resu
lting CuInS2 films. (C) 2000 Elsevier Science S.A. All rights reserved.