As the material structures of CdS-CdTe heterojunction solar cells have a si
gnificant effect on cell efficiency, there is a requirement to investigate
new methods for thin film, structural, depth profiling. In an attempt to ch
aracterise structural details such as stress, stoichiometry and texture, we
have developed a novel method of depth profiling, This is based upon a che
mical etch bevel followed by spatially resolved Xray diffraction and Ruther
ford backscattering spectrometry. We show that the method provides a depth
resolution of better than 0.1 mu m.
We have used this method to examine CdTe thin films ( similar to 1.8 mu m)
produced by electrodeposition supported upon CdS ( < 0.1 mu m). We present
the results of these studies and use the method to investigate the: effect
upon the structures of a type conversion anneal. The data is compared to pr
evious studies using different depth profiling methods. The results indicat
e the formation of an spatially limited, intermixed CdTe(1-x)Sx layer and t
he conversion of the whole CdS film into a CdS(1-x)Tex layer. The structura
l characteristics are correlated to optical and electrical properties of th
e films. (C) 2000 Elsevier Science S.A. All rights reserved.