A cantilever array-based artificial nose

We present quantitative and qualitative detection of analyte vapors using a microfabricated silicon cantilever array, To observe transduction of physi cal and chemical processes into nanomechanical motion of the cantilever, sw elling of a polymer layer on the cantilever is monitored during exposure to the analyte. This motion is tracked by a beam-deflection technique using a time multiplexing scheme. The response pattern of eight cantilevers is ana lyzed via principal component analysis (PCA) and artificial neural network (ANN) techniques, which facilitates the application of the device as an art ificial chemical nose. Analytes tested comprise chemical solvents, a homolo gous series of primary alcohols, and natural flavors. First differential me asurements of surface stress change due to protein adsorption on a cantilev er array are shown using a liquid cell. (C) 2000 Elsevier Science B.V. All rights reserved.