Citation
Cl. Britton et al., Multiple-input microcantilever sensors, ULTRAMICROS, 82(1-4), 2000, pp. 17-21
Citations number
7
Categorie Soggetti
Multidisciplinary,"Spectroscopy /Instrumentation/Analytical Sciences
Journal title
ULTRAMICROSCOPY
ISSN journal
03043991
→ ACNP
Volume
82
Issue
1-4
Year of publication
2000
Pages
17 - 21
Database
ISI
SICI code
0304-3991(200002)82:1-4<17:MMS>2.0.ZU;2-P
Abstract
A surface-micromachined micro-electro-mechanical-system (MEMS) process has
been used to demonstrate multiple-input chemical sensing using selectively
coated cantilever arrays. Cantilever motion due to absorption-induced stres
s was readout using a custom-designed, eight-channel integrated circuit. Co
mbined hydrogen and mercury vapor detection was achieved with a palm-sized,
self-powered module with spread-spectrum telemetry reporting. (C) 2000 Els
evier Science B.V. All rights reserved.