EFFECTS OF DEPOSITION CONDITIONS ON PHYSICAL-PROPERTIES AND STRESSES OF PT AND (AL, SI)O-X THIN-FILMS

Authors
LEE JS PARK JW PARK JS PARK HD SHIN SM
Citation
Js. Lee et al., EFFECTS OF DEPOSITION CONDITIONS ON PHYSICAL-PROPERTIES AND STRESSES OF PT AND (AL, SI)O-X THIN-FILMS, Journal of materials science letters, 16(11), 1997, pp. 941-945
Citations number
20
Categorie Soggetti
Material Science
Journal title
Journal of materials science letters → ACNP
ISSN journal
02618028
Volume
16
Issue
11
Year of publication
1997
Pages
941 - 945
Database
ISI
SICI code
0261-8028(1997)16:11<941:EODCOP>2.0.ZU;2-I