Compositional profiling of solution-deposited lead zirconate-titanate thinfilms by radio-frequency glow discharge atomic emission spectroscopy (rf-GD-AES)

Depth-resolved elemental analysis of perovskite thin films based on lead zi rconate-titanate (PZT) is performed by a relatively new technique; radio-fr equency glow discharge atomic emission spectroscopy (rf-GD-AES). The techni que provides in-depth composition information for the PZT layer, and underl ying layers within the device architecture. Total film thicknesses of simil ar to 1 mu m are profiled in < 30 s. Differences in pyrolysis conditions fo r two sol-gel produced films are easily identified based on the profiles of residual C, H, and O species. The technique is projected to be a valuable aid in the development of new electronic devices. (C) 2000 Elsevier Science B.V. All rights reserved.