A study on low-temperature crystallization of SrBi2Ta2O9 thin films prepared by sol-gel method using steam curing process

Authors
Sawada, Y Kobari, H Sato, Y Hashimoto, A Koiwa, I Kobayashi, H Osaka, T
Citation
Y. Sawada et al., A study on low-temperature crystallization of SrBi2Ta2O9 thin films prepared by sol-gel method using steam curing process, INTEGR FERR, 26(1-4), 1999, pp. 889-897
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Eletrical & Eletronics Engineeing
Journal title
INTEGRATED FERROELECTRICS
ISSN journal
10584587 → ACNP
Volume
26
Issue
1-4
Year of publication
1999
Pages
889 - 897
Database
ISI
SICI code
1058-4587(1999)26:1-4<889:ASOLCO>2.0.ZU;2-A
Abstract
We have been developing our original hydrolyzed sol-gel coating solutions f or the SrBi2Ta2O9 (SBT) thin film. The molecular structure of the solution can be controlled by hydrolysis. We studied the SBT thin film forming proce ss using these coating solutions with the steam curing process used togethe r and observed lower crystallization temperature and improvement of crystal orientation.