Studies on PZT precursor solutions

A series of organic solvents has been used for the preparation of PZT precu rsor solutions. The stability and the volatility of these PZT precursors ha ve been tested. The results indicate the promising organic solvents are but yl ether, THF, 2-methoxyethyl ether, H(tmhd) and tetraglyme. PZT precursors include Zr(tmhd)(4), Zr(OPri)(4)(HOPri), Zr(OPri)(2)(tmhd)(2), Pb(tmhd)(2) , Ti(OPri)(4) and Ti(OPri)(2)(tmhd)(2), which can be dissolved in some spec ial combinations of these organic solvents without losing volatility. Howev er, isa-propanol should be introduced into the PZT precursor solutions if T i(OPri)(4) is used as the titanium source. The preparations of PZT thin fil m via MOCVD have been carried out by using new PZT precursor solutions, and high quality PZT thin films have been obtained.