I. Stolichnov et al., Degradation of asymmetrical Pt/SRO/PLZT/Pt capacitors: Role of Pt and oxide electrodes, INTEGR FERR, 26(1-4), 1999, pp. 1013-1023
Role of Pt and SRO electrodes in polarization fatigue of PLZT film ferroele
ctric capacitors is studied. We show that asymmetrical Pt/SRO/PLZT/Pt struc
ture exhibits unusual dependence of the endurance of switching polarization
on the driving ac electric field amplitude. Specifically, for high ac elec
tric field amplitude it shows a good switching endurance similar to SRO/PLZ
T/SRO capacitors, whereas for amplitude lower than 80 kV/cm a pronounced po
larization fatigue similar to that of conventional Pt/PLZT/Pt capacitors is
observed. Based on the analysis of these results we conclude that the pola
rization switching endurance under high-amplitude fatiguing cycling is gove
rned only by the top SRO-interface which is not subjected to degradation, w
hereas the degradation properties of the bottom Pt-interface do not play an
y role.
Comparative analysis of leakage conduction of Pt/PLZT/Pt (i) and Pt/SRO/PLZ
T/Pt (ii) capacitors in virgin and fatigued states shows that both interfac
es of capacitor (i) are subjected to degradation whereas both interfaces of
the capacitor (ii) are not degraded. According to our analysis, in asymmet
rical Pt/SRO/PLZT/Pt structure the top SRO-interface can protect the bottom
Pt interface from degradation if the following conditions are met:
1. Top SRO interface is degradation-free
2. Switching rate at the top electrode is higher than at the bottom one.