Sol-gel derived PZT/RuO2 multilayer films on stainless steel substrates

The structural and electric properties of PZT thin films deposited by the s ol-gel process on RuO2 coated stainless steel as well as on bare stainless steel were studied and compared. As-deposited amorphous RuO2 thin films on stainless steel were transformed to pure rutile-type RuO2 at temperatures r anging from 400 degrees C to 600 degrees C, the resistivity of which had a value less than 200 mu Ohm . cm. The PZT films processed on RuO2 needed sli ghtly higher temperature (610 degrees C) in order to be completely transfor med into the perovskite phase than PZT on stainless steel (600 degrees C). The films showed best ferroelectric properties when depositing it on the 10 0 nm thick RuO2 bottom electrodes fired at 400 degrees C for 10 minutes. Th e hysteresis loops of the PZT films were more slim when being processed on RuO2 coated stainless steel than on bare stainless steel. For the RuO2 bott om electrodes the values of coercive field decreased to about 55% of those without a RuO2 layer.