On-line monitoring of boron in dichlorosilane by means of inductively coupled plasma atomic emission spectrometry (ICP-AES)

Authors
Eschwey, M Pulvermacher, E Benninghoff, C Telgheder, U
Citation
M. Eschwey et al., On-line monitoring of boron in dichlorosilane by means of inductively coupled plasma atomic emission spectrometry (ICP-AES), J ANAL ATOM, 15(3), 2000, pp. 277-279
Citations number
5
Categorie Soggetti
Spectroscopy /Instrumentation/Analytical Sciences
Journal title
JOURNAL OF ANALYTICAL ATOMIC SPECTROMETRY
ISSN journal
02679477 → ACNP
Volume
15
Issue
3
Year of publication
2000
Pages
277 - 279
Database
ISI
SICI code
0267-9477(2000)15:3<277:OMOBID>2.0.ZU;2-M
Abstract
An analytical procedure is described for the determination of boron in dich lorosilane by means of ICP-AES. A modified sampling and gas introduction sy stem allows on-line monitoring of the investigated gas. The calibration of the procedure was carried out by standard additions of gaseous diborane/arg on [c(B2H6) = 10.4 mu l l(-1)] and dichlorosilane. The detection limit was found to be 0.63 mu g boron g(-1) of dichlorosilane.