The surface photovoltage (SPV) effect induced by the defect states in semi-
insulating (SI) GaAs was studied. The PV response below the band edge was m
easured at room temperature with a de optical biasing. The spectra were fou
nd to be strongly dependent on the surface recombination and were attribute
d to formation of the carrier concentration gradient near the surface regio
n, showing that SPV is a very sensitive and nondestructive technique for ch
aracterizing the surface quality of the SI-GaAs wafers.