A porous silicon (PS) layer formed electrochemically in the outer part of t
he n(+) emitter of p-ni Si junctions can be used as an efficient antireflec
tion coating (ARC). A two-step procedure is presented which can determine t
he electrochemical parameters leading to the formation of an optimized sing
le-layer PS ARC. Single-layer PS ARCs achieving approximate to 7% effective
reflectance between 400 and 1000 nm are obtained on shallow p-n(+) junctio
n solar cells. To reduce the reflectance further, the design of double-laye
r ARCs based on PS is investigated. PS layers with different porosities can
be realized in a single experiment by modulating the current density durin
g the electrochemical process. It is shown theoretically and experimentally
that such PS structures can lead to an effective reflectance below 3%. (C)
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