Progress towards achieving integrated circuit functionality using porous silicon optoelectronic components

Authors
Benson, TM Arrand, HF Sewell, P Niemeyer, D Loni, A Bozeat, RJ Kruger, M Arens-Fischer, R Thonissen, M Luth, H
Citation
Tm. Benson et al., Progress towards achieving integrated circuit functionality using porous silicon optoelectronic components, MAT SCI E B, 69, 2000, pp. 92-99
Citations number
31
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY
ISSN journal
09215107 → ACNP
Volume
69
Year of publication
2000
Pages
92 - 99
Database
ISI
SICI code
0921-5107(20000119)69:<92:PTAICF>2.0.ZU;2-J
Abstract
Porous silicon offers many potential advantages for the realisation of opto electronic circuits and systems. This paper assesses some of the technologi es available for the fabrication of porous silicon waveguides for visible a nd infrared applications. The unique physical and chemical properties of th e material enable additional functionality over other silicon-based optoele ctronic technologies. As an example, optical sensing of solvents and vapour s is discussed using both optical waveguides and multi-layer reflector stac ks. (C) 2000 Elsevier Science S.A. All rights reserved.