Nanocrystalline silicon formation by CW laser-irradiation of amorphous sili
con-oxygen alloys of variable composition has been investigated as a functi
on of both laser power density and alloy composition. Structural changes du
ring the annealing treatment were monitored 'in situ' by micro Raman spectr
oscopy. Careful Raman lineshape analysis in the 450-550 cm(-1) range allowe
d the evaluation of Si nanocrystal size distribution. It is shown that depe
nding on the size of the nanocrystallites, irradiation can yield to a stron
g photoluminescence (PL) enhancement or quenching. (C) 2000 Elsevier Scienc
e S.A. All rights reserved.