Microstructural studies of oxygen irradiated CdTe thin films

In this paper. a study of the microstructural aspects of CdTe thin films ir radiated with 100 keV oxygen ions at room temperature is presented. Grain g rowth, preferred orientation of the grains, and the stress relaxation in th e films are studied as a function of the irradiation dose ranging from 1 x 10(14) ions/cm(2) to 5 x 10(16) ions/cm(2). The study revealed that CdTe th in films show an increased texturing with the grains getting reoriented alo ng the (111) direction as a function of the irradiation dose. The average g rain size in the irradiated CdTe thin films increases with the increase in ion dose according to the relation L-10.11 - L-0(10.11) = K phi It is also observe. that the stress in the lattice relaxes as a function of the irradi ation dose.