Fast approach to kinetic simulations of RF discharge in plasma reactors

Authors
Schweigert, VA Alexandrov, AL Gimelshtein, SF Ivanov, MS
Citation
Va. Schweigert et al., Fast approach to kinetic simulations of RF discharge in plasma reactors, PLASMA SOUR, 9(1), 2000, pp. B1-B3
Citations number
6
Categorie Soggetti
Physics
Journal title
PLASMA SOURCES SCIENCE & TECHNOLOGY
ISSN journal
09630252 → ACNP
Volume
9
Issue
1
Year of publication
2000
Pages
B1 - B3
Database
ISI
SICI code
0963-0252(200002)9:1<B1:FATKSO>2.0.ZU;2-R
Abstract
A calculational approach is developed to accelerate the particle-in-cell Mo nte Carlo-collision simulations of a radio-frequency discharge plasma. It i s based on the splitting of the treatment of fast-relaxing and slow-relaxin g distribution functions, which allows one to avoid some time-step limitati ons. Comparisons with the usual simulation method shows a 10 to 30 times de crease of computational expenses.