Evaluation of theoretical models for elastic electron backscattering from surfaces

In recent years, there has been an increasing interest in the elastic elect ron backscattering phenomenon partly due to its use in experimental determi nation of inelastic electron mean-free-paths. A critical review is presente d of the current status of theoretical models to describe this phenomenon. Particular stress is put on determination of the accuracy and ranee of vali dity of various analytical models by comparison to extensive Monte Carlo si mulations. (C) 2000 Published by Elsevier Science Ltd. All rights reserved.