EFTEM provides elemental mapping at nanometer resolution

Authors
Hofer, F Leitner, O
Citation
F. Hofer et O. Leitner, EFTEM provides elemental mapping at nanometer resolution, SOL ST TECH, 43(3), 2000, pp. S23
Citations number
8
Categorie Soggetti
Eletrical & Eletronics Engineeing
Journal title
SOLID STATE TECHNOLOGY
ISSN journal
0038111X → ACNP
Volume
43
Issue
3
Year of publication
2000
Database
ISI
SICI code
0038-111X(200003)43:3<S23:EPEMAN>2.0.ZU;2-H
Abstract
Energy-filtering transmission electron microscopy is becoming an important nanoanalysis technique in materials science. Its main advantage comes from the two-dimensional chemical information or "elemental maps" at nanometer r esolution extracted quickly from large sample areas. Work with a post-colum n imaging filter on a 200kV microscope illustrates the value of this techni que for semiconductor device research.