This work aimed to develop indium tin oxide (ITO) coatings with optimum opt
oelectronic properties required for applications in organic light emitting
diode (OLED) devices on flexible thin glass substrates. This involved intro
ducing hydrogen in gas mixture during ITO film preparation using radio freq
uency magnetron sputtering method. Uniform ITO films with resistivity of 2.
7 x 10(-4) Omega cm and transparency of 85% over the visible wavelength reg
ion was achieved. The presence of hydrogen gas in the sputtering processes
was shown to increase the number of charge carriers in the ITO films. The f
easibility of using the ITO films with high carrier concentration was exami
ned and tested in OLED devices composing a fluorene based polymeric hole tr
ansporting layer (HTL) and green-emitting polymer, benzothiadiadzole-fluore
ne. The devices made with different ITO substrates had an identical configu
ration of ITO/HTL/emitter polymer/Ca (6 nm)/Ag (200 nm). The device showed
that a maximum luminance of 4.36 x 10(4) cd/m(2) and an efficiency of 4.14
cd/A were achieved when an optimal ITO layer was used. These results an com
parable with that of devices made with the best commercially available ITO
products operated at the same conditions. (C) 2000 Elsevier Science S.A. Al
l rights reserved.