MULTILAYER AND THIN-FILM ANALYSIS USING FPMULTI SOFTWARE

X-ray spectrometry combined with a fundamental parameter package can b e used to obtain semiquantitative analytical results for thin layered samples. This paper explores the use of the program FPMulti for variou s applications. These applications are examples of how accurate this p rogram is for multilayer and thin film analysis. After a short descrip tion of the analytical method, the range of applications is given with which the authors have experience. In the experimental section three applications are described in more detail: (i) an example to show the accuracy of the method, (ii) an example of the calculation of the laye r thickness and (iii) the possibility of quantifying oxygen in 3d meta l oxides. (C) 1997 by John Wiley & Sons, Ltd.