High-selectivity single-chip spectrometer in silicon for operation at visible part of the spectrum

A microspectrometer has been realized based on an array of Fabry-Perot opti cal thin-film filters. The 16-channel microspectrometer is compatible with IC fabrication methods and operates in the risible spectral range with an i nterchannel shift of 6 nm, Each of the channels is sensitive in a single pe ak with full-width-half-maximum (FWHM) of 16 nm, Also a FWHM below 2 nm and finesse of 40 for narrow band operation is demonstrated, The device can ea sily be tuned during fabrication to cover a different spectral band only by adjusting the etching times without affecting the device layout, Such a de vice is extremely suitable for applications in microsystems because of its small size, high spectral selectivity, and low cost. Microspectrometers for the UV and IR regions are also feasible using this technique.