Jh. Correia et al., High-selectivity single-chip spectrometer in silicon for operation at visible part of the spectrum, IEEE DEVICE, 47(3), 2000, pp. 553-559
A microspectrometer has been realized based on an array of Fabry-Perot opti
cal thin-film filters. The 16-channel microspectrometer is compatible with
IC fabrication methods and operates in the risible spectral range with an i
nterchannel shift of 6 nm, Each of the channels is sensitive in a single pe
ak with full-width-half-maximum (FWHM) of 16 nm, Also a FWHM below 2 nm and
finesse of 40 for narrow band operation is demonstrated, The device can ea
sily be tuned during fabrication to cover a different spectral band only by
adjusting the etching times without affecting the device layout, Such a de
vice is extremely suitable for applications in microsystems because of its
small size, high spectral selectivity, and low cost. Microspectrometers for
the UV and IR regions are also feasible using this technique.