Corrosion of aluminum nitride (AlN) in aqueous cleaning solutions

Authors
Svedberg, LM Arndt, KC Cima, MJ
Citation
Lm. Svedberg et al., Corrosion of aluminum nitride (AlN) in aqueous cleaning solutions, J AM CERAM, 83(1), 2000, pp. 41-46
Citations number
14
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
JOURNAL OF THE AMERICAN CERAMIC SOCIETY
ISSN journal
00027820 → ACNP
Volume
83
Issue
1
Year of publication
2000
Pages
41 - 46
Database
ISI
SICI code
0002-7820(200001)83:1<41:COAN(I>2.0.ZU;2-V
Abstract
The corrosion of aluminum nitride (AIN) in aqueous solutions has been evalu ated in situ, using an ammonium/ammonia ion-selective electrode. The corros ion behavior of AIN over a pH range of 5.5-12 indicates that the corrosion products that are formed act as a protective barrier layer in the pH regime where they have the lowest stability, An insoluble barrier layer is formed via the oxidation of the AM surface in air at a temperature of 750 degrees C for 10 min. This oxynitride layer, which is 200 Angstrom thick, prevents the corrosion of the AlN in a pH 9.5 aqueous solution; however, the therma l conductivity is reduced by 6.6%.