A novel Sr-Ta-O perovskite phase has been synthesized by a chemical prepara
tion route and crystallized on Pt-coated SiO2/Si substrates at similar to 8
00 degrees C, The phase was isolated as a thin film only (not as a polycrys
talline powder) and is likely metastable, SEM, EDS, XRD, EPR, and Raman ana
lyses suggest this phase is cation-deficient, having the formula SrxTaxO3 (
x similar to 0.85). X-ray Rietveld analysis indicates the structure to be a
simple-cubic perovskite-type lattice; Pm3m space group, a = 3.955(2) Angst
rom, V = 61.86 Angstrom(3), Z = 1, Electrical property measurements recorde
d a dielectric constant k of similar to 16 with a tan delta of 0.04.