Structural analysis of heat-treated chromium oxycarbide films

Authors
Kado, T
Citation
T. Kado, Structural analysis of heat-treated chromium oxycarbide films, J AM CERAM, 82(11), 1999, pp. 3245-3247
Citations number
10
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
JOURNAL OF THE AMERICAN CERAMIC SOCIETY
ISSN journal
00027820 → ACNP
Volume
82
Issue
11
Year of publication
1999
Pages
3245 - 3247
Database
ISI
SICI code
0002-7820(199911)82:11<3245:SAOHCO>2.0.ZU;2-C
Abstract
Chromium oxycarbide (Cr2CO) films were deposited on stainless steel and cop per plates via plasma-assisted chemical vapor deposition. The films were he ated to 1073 K under high-vacuum conditions, to examine the high-temperatur e stability of the films. X-ray diffractometry revealed that the films deco mposed to a mixed structure of Cr2O3 and Cr3C2. Thermogravimetric analysis and differential thermal analysis revealed that the decomposition occurred in the temperature range of 858-910 K.