Metals can exhibit dendritic short-circuit growth caused by electrochemical
migration in conductor-insulator structures, which may result in failures
and reliability problems in microcircuits. The classical model of electroch
emical migration has been well known for several decades. This process is a
transport of metal ions between two metallization stripes under bias throu
gh a continuous aqueous electrolyte. Due to the electrochemical deposition
at the cathode, dendrites and dendrite-like deposits are formed. Ultimately
, such a deposit can lead to a short circuit in the device and can cause ca
tastrophic failure. Recent investigations have demonstrated that not only m
etallic components, but also oxides from the isolating layers can take part
in the formation of migrated shorts, after a chemical reduction process. M
aterial design aspects need to clarify the correlation between material com
position, processing, chemical bonding state, and electrochemical migration
failure rate in isolating compounds: this is the scope of the present stud
y. (C) 2000 Elsevier Science Ltd. All rights reserved.