Pulsed laser vaporization and deposition

Citation
Pr. Willmott et Jr. Huber, Pulsed laser vaporization and deposition, REV M PHYS, 72(1), 2000, pp. 315-328
Citations number
68
Categorie Soggetti
Physics
Journal title
REVIEWS OF MODERN PHYSICS
ISSN journal
00346861 → ACNP
Volume
72
Issue
1
Year of publication
2000
Pages
315 - 328
Database
ISI
SICI code
0034-6861(200001)72:1<315:PLVAD>2.0.ZU;2-J
Abstract
Photons have many advantages for vaporizing condensed systems, and laser va porization sources have a flexibility not available with other methods. The se sources are applied to making thin films in the well-known technique of pulsed laser deposition (PLD). The vaporized material may be further proces sed through a pulsed secondary gas, lending the source additional degrees, of freedom. Such pulsed-gas sources have long been exploited for fundamenta l studies, and they are very promising for him deposition, as an alternativ e to chemical vapor deposition or molecular beam epitaxy. The authors outli ne the fundamental physics involved and go on to discuss recent experimenta l findings.