A electrostatic micromechanical switch for logic operation in multichip modules on Si

An electrostatic micromechanical switch that can conduct a logic operation with only one switch is proposed. This switch can perform an "AND" or an "O R" logic operation because it has two pairs of drive electrodes and its swi tching is controlled by the number of drive electrodes to which driving vol tage is applied. A new beam layout makes it possible to decrease the drivin g voltage without increasing the switch area. The driving voltage can be re duced to 15 V when switch area is 60 x 70 mu m(2). The switch, which can be fabricated by standard LSI processes, is ideal for making compact logic ci rcuits for multichip modules (MCMs) on Si. (C) 2000 Elsevier Science S.A. A ll rights reserved.