Fabrication of micro IC probe for LSI testing

A micro IC probe, which is a small, elastic electrical contact, has been de veloped to improve LSI testing and reduce its cost. No larger than 300 X 80 mu m, it is fabricated with a pitch of 100 mu m by micromachining techniqu es. Its contact resistance is less than 0.5 Ohm, satisfying the requirement s for conventional probes, and its deflection is 2 to 8 mu m to accommodate height differences among LSI pads while maintaining contact. (C) 2000 Else vier Science S.A. All rights reserved.