An integrated MEMS three-dimensional tactile sensor with large force range

An integrated three-dimensional tactile sensor with robust MEMS structure a nd soft contact surface suitable for robotic applications was developed. Th e sensor has a maximum force range of 50 N in the vertical direction and +/ -10 N in the x and y horizontal directions. The tactile sensor includes 4 X 8 sensing cells each exhibiting an independent, linear response to the thr ee components of forces applied on the cells. By finite element analysis, o ptimal cell structures and piezoresistor positions were determined. Post bu lk-micromachining was performed on foundry-fabricated CMOS chips to produce the sensor cells. With neural network training, the tactile sensor produce d reliable three-dimensional force measurements and repeatable response on tactile images. Design analysis, fabrication procedures, and experimental r esults are presented in this paper. (C) 2000 Published by Elsevier Science S.A. All rights reserved.