Numerical simulation of an electron cyclotron resonance plasma source

Using a two-dimensional hybrid-model with self-consistent microwave absorpt ion, the variations of plasma parameters such as ionization rate, plasma de nsity, plasma potential, and electron temperature with operation conditions were studied. Results of simulation show that nonlinear phenomena such as region character, saturation, and oscillation of plasma parameters can be d eveloped when the operation conditions (pressure, power) were changed.