Conical diamond tips realized by a double-molding process for high-resolution profilometry and atomic force microscopy applications

High aspect ratio diamond tips with a small radius of curvature were fabric ated by means of a double-molding process and hot-filament chemical vapor d eposition of diamond. The tips proved to perfectly reproduce the geometry o f anisotropically etched silicon tips, which were used as first mold. The d iamond tips were mounted on stubs for contact profilometry imaging as well as transferred to cantilevers for atomic force microscopy measurements. Bot h profilometry and atomic force microscopy investigations have demonstrated the high application potential of these tips. (C) 2000 American Institute of Physics. [S0003-6951(00)01312-7].