FABRICATION OF CR NANOSTRUCTURES WITH THE SCANNING TUNNELING MICROSCOPE

Citation
W. Xie et al., FABRICATION OF CR NANOSTRUCTURES WITH THE SCANNING TUNNELING MICROSCOPE, Nanotechnology, 8(2), 1997, pp. 88-93
Citations number
24
Categorie Soggetti
Engineering,"Physics, Applied
Journal title
ISSN journal
09574484
Volume
8
Issue
2
Year of publication
1997
Pages
88 - 93
Database
ISI
SICI code
0957-4484(1997)8:2<88:FOCNWT>2.0.ZU;2-1
Abstract
In this work, nanometer scale electrically conducting lines and quantu m structures on chromium (Cr) films have been fabricated with an ambie nt scanning tunnelling microscope and a subsequent CR-14 chromium etch . The line width of these structures is approximately 60 nm and the he ight of the lines is approximately 10 nm. In addition, experiments hav e been performed to determine the Cr etch rate in CR-14 etchant and th e thickness of the Cr layer that could be oxidized through by the STM tunnelling current.