Design of a micro-mechanical capacitor with microwave functions

The study concerns remote controlled sensors, associating micro-mechanical and microwave data communication functions. A radio link can be used to tra nsmit information from the sensor as well as to provide internal power supp ly. Applications include Wireless Sensor Networks projects. An important op eration is performed through a passive microwave frequency shifter used for retransmission. Two structures of this frequency shifter using silicon mem brane micro-mechanical capacitors are described, with further details conce rning the optimisation of the dimensions using electro-mechanical modellisa tion, the problems in technological silicon implantation, and some first ex perimental results.