A tool for X-ray diffraction analysis of thin layers on substrates: substrate peak removal method

A method is proposed that removes the substrate peaks from a diffraction pa ttern recorded from a substrate covered with a thin layer, using a separate measurement of the uncovered substrate. The obtained diffractogram without substrate peaks can then be used for the characterization of the microstru cture of the thin layer. As an example, the method is shown to yield good r esults for a TiN layer deposited on a tool-steel substrate.