A number of fused silica samples were evaluated for their resistance to den
sification by deep UV radiation at 193 nm wavelength. Density changes for a
ll the samples equal the product of a material dependent constant and the a
bsorbed two-photon dose to a sublinear power of about 2/3. This dose depend
ence is consistent with earlier compaction studies using UV, electron, and
gamma radiation. We also studied the isothermal-annealing behavior of UV-in
duced compaction in fused silica and found a correlation between thermal re
covery of compaction and the compaction rates for different fused silica sa
mples. Preheat-treatment at 950 degrees C for 1 h increased the UV-induced
compaction rate of two types of fused silica samples, but did not affect th
at of the other two types of samples. Based on these experimental observati
ons and the well-accepted network structure model of glasses, we propose a
model to explain the sublinear power dependence on absorbed radiation dose
for the ionization-induced compaction. (C) 2000 American Institute of Physi
cs. [S0021-8979(00)06306-4].