A quantitative approach to Makyoh (magic-mirror) topography

Authors
Riesz, F
Citation
F. Riesz, A quantitative approach to Makyoh (magic-mirror) topography, J CRYST GR, 210(1-3), 2000, pp. 370-374
Citations number
8
Categorie Soggetti
Physical Chemistry/Chemical Physics
Journal title
JOURNAL OF CRYSTAL GROWTH
ISSN journal
00220248 → ACNP
Volume
210
Issue
1-3
Year of publication
2000
Pages
370 - 374
Database
ISI
SICI code
0022-0248(200003)210:1-3<370:AQATM(>2.0.ZU;2-4
Abstract
A geometrical optical model of Makyoh-topography image formation is present ed. Fundamental features of the imaging are established. Computer simulatio ns and experimental images of a semiconductor wafer are presented to illust rate the model. (C) 2000 Elsevier Science B.V. All rights reserved.