M. Cremona et al., Grain size distribution analysis in polycrystalline LiF thin films by mathematical morphology techniques on AFM images and X-ray diffraction data, J MICROSC O, 197, 2000, pp. 260-267
The influence of the deposition temperature on the grain size of polycrysta
lline lithium fluoride (LiF) thin films is studied using a mathematical mor
phology method. On atomic force microscopy images of the LiF surface, the g
rain sizes and shapes are determined by applying the watershed technique, t
ogether with a shape factor algorithm. Also, the domain size of the film st
ructure, determined by an X-ray diffraction data analysis, is compared and
correlated with the mean grain size as a function of the deposition tempera
ture. In both cases a linear increase with temperature and a very good agre
ement among the two structural parameters (grain and domain size) was found
.