Characterization of magnesium fluoride thin films deposited by direct electron beam evaporation

Authors
Dumas, L Quesnel, E Robic, JY Pauleau, Y
Citation
L. Dumas et al., Characterization of magnesium fluoride thin films deposited by direct electron beam evaporation, J VAC SCI A, 18(2), 2000, pp. 465-469
Citations number
19
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS
ISSN journal
07342101 → ACNP
Volume
18
Issue
2
Year of publication
2000
Pages
465 - 469
Database
ISI
SICI code
0734-2101(200003/04)18:2<465:COMFTF>2.0.ZU;2-D
Abstract
Magnesium fluoride films have been deposited on quartz and silicon substrat es by direct electron beam evaporation. The structure, composition, and mas s density of films were investigated as functions of the deposition tempera ture ranging from ambient temperature to 300 degrees C. The composition of films determined by infrared spectroscopy, and the residual stresses in fil ms calculated from the change of the radius of curvature of Si substrates, were studied as functions of the aging time of films in room air and deposi tion temperature. The aging behavior is analyzed and discussed in connectio n with the microstructure and mass density of films. (C) 2000 American Vacu um Society. [S0734-2101(00)00102-0].