The surface atomic and electronic structures of cuprous halide CuX (X = Cl,
Br, and I) films, which were grown on various GaAs faces, have been studie
d by reflection high-energy electron diffraction, Auger electron spectrosco
py, and electron energy loss spectroscopy. Epitaxial growth in a layer by l
ayer fashion was observed commonly on all GaAs faces, except on a GaAs (1 1
1) As 2 x 2 race. The growth mode at the initial stage was affected by the
lattice misfit of CuX to GaAs. Auger electron spectra and electron energy
loss spectra of CuX depend on the crystal race of the substrate. These resu
lts indicate that CuX have both ionic and covalent Features in the film gro
wth process. (C) 2000 American Vacuum Society. [S0734-2101(00)08002-7].