M. Lebedev et al., Simple self-selective method of velocity measurement for particles in impact-based deposition, J VAC SCI A, 18(2), 2000, pp. 563-566
A simple, low-cost technique for particles velocity measurement in the gas
deposition method (CDM) is reported. The accuracy of the technique is deter
mined only by the precision of measurements of geometrical sizes of deposit
ed pattern. Self-selection of the particles with parameters acceptable for
deposition occurs. Under typical deposition conditions the velocities about
200 m/s for ceramic particles and up to 650 m/s for metal ones were detect
ed. The proposed technique allows in situ monitoring during deposition both
by GDM and by other deposition methods. (C) 2000 American Vacuum Society.
[S0734-2101(00)01502-5].