Papers from the Ninth Canadian Semiconductor Technology Conference - 10-13August 1999 - The Chateau Laurier Hotel Ottawa, Canada - Preface

Authors
Janz, S Das, SR Landheer, D
Citation
S. Janz et al., Papers from the Ninth Canadian Semiconductor Technology Conference - 10-13August 1999 - The Chateau Laurier Hotel Ottawa, Canada - Preface, J VAC SCI A, 18(2), 2000, pp. 573-573
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS
ISSN journal
07342101 → ACNP
Volume
18
Issue
2
Year of publication
2000
Pages
573 - 573
Database
ISI
SICI code
0734-2101(200003/04)18:2<573:PFTNCS>2.0.ZU;2-9