C. Julien et al., Growth of LiMn2O4 thin films by pulsed-laser deposition and their electrochemical properties in lithium microbatteries, MAT SCI E B, 72(1), 2000, pp. 36-46
Films of LiMn2O4 were grown by pulsed-laser deposition (PLD) onto silicon w
afers using sintered targets which consisted in the mixture of LiMn2O4 and
Li2O powders. The film formation has been studied as a function of the prep
aration conditions, i.e. composition of the target, substrate temperature,
and oxygen partial pressure in the deposition chamber. Composition, morphol
ogy and structural properties of PLD films have been investigated using Rut
herford backscattering spectrocopy, scanning electron microscopy, X-ray dif
fraction and Raman scattering spectroscopy. The films deposited from target
LiMn2O4 + 15% Li2O have an excellent crystallinity when deposited onto sil
icon substrate maintained at 300 degrees C in an oxygen partial pressure of
100 mTorr. It is found that such a film crystallizes in the spinel structu
re (Fd3m symmetry) as evidenced by X-ray diffraction. Well-textured polycry
stalline films exhibit crystallite size of 300 nm. Pulsed-laser deposited L
iMn2O4 thin films obtained with a polycrystalline morphology were successfu
lly used as cathode materials in lithium microbatteries. The Li//LiMn2O4 th
in film cells have been tested by cyclic voltammetry and galvanostatic char
ge-discharge techniques in the potential range 3.0-4.2 V. Specific capacity
as high as 120 mC/cm(2) mu m was measured on polycrystalline Mms. The chem
ical diffusion coefficients for the LixMn2O4 thin films appear to be in the
range of 10(-11)-10(-12) cm(2)/s. Electrochemical measurements show a good
cycleability of PLD films when cells are charged-discharged at current den
sities of 5-25 mu A/cm(2). (C) 2000 Elsevier Science S.A. All rights reserv
ed.