Nb-Pd multilayers were prepared by laser deposition. Samples were loaded el
ectrolytically with hydrogen up to 0.3 H/Nb, others were submitted to four
complete loading-unloading cycles and remained loaded. The microstructure o
f these samples as well as that of as-prepared samples were studied by high
resolution electron microscopy. After several hydrogen loading and unloadi
ng cycles the change in microstructure consists mainly of a new arrangement
of dislocations. Further transmission electron microscopy studies reveal t
hat beta-NbH grows in columns parallel to the growth direction of the films
after phase separation. X-ray studies show that after unloading from the b
eta-NbH phase the stress in the film changes to the reverse mode. This is v
alid for completely loaded as well as partially loaded specimens.