Electron emission from slow Ar17+ ions interacting with a Si surface

Experimental and theoretical methods were used to study the formation of ho llow atoms during the interaction of Ar17+ projectiles with a Si(lll) surfa ce. Electron spectra were taken in a wide range of projectile energies from 17 eV to 170 keV. Peak structures due to K- and L-Auger electrons were fou nd to vary significantly with the projectile energy. The angular dependence of the Auger electron intensities were interpreted by means of model calcu lations yielding information about the decay depth of the hollow atoms with in the first layers of the surface.