Giant magnetostriction thin films for multi-cantilever micro-structures driving

Authors
Tiercelin, N Pernod, P Preobrazhensky, V Le Gall, H Ben Youssef, J Mounaix, P Lippens, D
Citation
N. Tiercelin et al., Giant magnetostriction thin films for multi-cantilever micro-structures driving, SENS ACTU-A, 81(1-3), 2000, pp. 162-165
Citations number
5
Categorie Soggetti
Instrumentation & Measurement
Journal title
SENSORS AND ACTUATORS A-PHYSICAL
ISSN journal
09244247 → ACNP
Volume
81
Issue
1-3
Year of publication
2000
Pages
162 - 165
Database
ISI
SICI code
0924-4247(20000401)81:1-3<162:GMTFFM>2.0.ZU;2-N
Abstract
First results on the realisation of a micrometer GaInAs multi-cantilever st ructure (50 x 30 x I mu m(3) each) driven by amorphous TbFe magnetostrictiv e thin films are presented. Magneto-elastic properties of the cantilevers w ere studied by dynamic excitation methods. A resonance of the bimorph canti levers was observed at an excitation frequency of 0.8 MHz with a Q-factor s f about 10(3). The coercive force of the magnetic films sputtered on micro- cantilevers was found to be H-c = 8 Oe. (C) 2000 Elsevier Science S.A. All rights reserved.