Fe-based amorphous thin film as a magnetoelastic sensor material

The aim of this paper is to analyze some Fe-based amorphous thin films as s ensing elements for magnetoelastic microsensors. Fe-based amorphous thin fi lms with thickness ranging from 0.1 to 1 mu m are prepared by r.f. sputteri ng method. Their magnetic properties (saturation magnetization M-s, magneti c anisotropy constant k(u) and curie temperature T-C), determining the perf ormance of the material used as magnetoelastic sensing element, are investi gated in correlation with the magnetoelastic properties (saturation magneto striction lambda(s), magnetoelastic coupling coefficient b(gamma,2), magnet ostrictive strain coefficient D and Delta E-effect). The magnetic and magne toelastic characterizations of the samples are performed using a torque mag netometer and a capacitive cantilever technique, respectively. Based on the obtained results, we discuss the specific qualities of the Fe-based amorph ous thin films in terms of their relevant material characteristics for magn etoelastic sensing application in comparison to the conventional magnetostr ictive thin films presently in use. (C) 2000 Elsevier Science S.A. All righ ts reserved.