Laser and sputter-deposited amorphous films for stress detection

Citation
T. Meydan et al., Laser and sputter-deposited amorphous films for stress detection, SENS ACTU-A, 81(1-3), 2000, pp. 254-257
Citations number
7
Categorie Soggetti
Instrumentation & Measurement
Journal title
SENSORS AND ACTUATORS A-PHYSICAL
ISSN journal
09244247 → ACNP
Volume
81
Issue
1-3
Year of publication
2000
Pages
254 - 257
Database
ISI
SICI code
0924-4247(20000401)81:1-3<254:LASAFF>2.0.ZU;2-H
Abstract
Amorphous magnetic films have been deposited onto Kapton(TM) and silicon su bstrates using the technique of laser ablation. The source material irradia ted by the laser was either a pack. of amorphous ribbons of composition Fe6 7Co18Si1B14 or Fe5.85Co72.15Mo2B15Si5 or a bulk amorphous material with the composition Fe4.35Co68.15Si12.5B15. Results show that all films deposited onto silicon exhibit isotropic magnetisation within the film plane despite being deposited in the presence of an external magnetic field. For those fi lms deposited onto Kapton,both isotropic and anisotropic magnetisation have been observed. Similar compositions deposited by magnetron sputtering have yielded films with in-plane magnetic anisotropy. These films, when subject ed to differing fixation pressures within a Kerr magneto-optical installati on, show changes in their hysteresis loops. These findings indicate a possi ble future for these films as sensing elements far stress detection devices . (C) 2000 Elsevier Science S.A. All rights reserved.