This paper describes the operation of a magnetic microactuator. A prototype
device consisting of a Nd-Fe-B permanent magnet, a silicon membrane and an
electroplated copper coil is used to verify models and to predict the defl
ection of the magnetic microactuator. The analysis of this device involves
the investigation of its electromagnetic and mechanical behaviour using ana
lytical methods and finite element analysis (FEA). A design procedure for a
magnetic microactuator is also outlined. The prototype device was characte
rised and the measured results compared to the theoretical data. Results sh
ow that the deflection of the device may be predicted to an accuracy of 20%
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