Twin-mass accelerometer optimization to reduce the package stresses

The geometry optimization of a piezoresistive Twin-mass accelerometer is pr esented. The Twin-mass design is the most sensitive design to the stresses of the package compared to the Cantilever beam and the Quad-beam designs. F inite element simulations are carried out to improve the geometry of the Tw in-mass design. Substitution of the perpendicular external beams by lateral external beams reduces the effects of the stresses of the package by a fac tor of more than 40. Moreover, the sensitivity and the figure of merit of t he device can be easily increased. (C) 2000 Elsevier Science S.A. All right s reserved.